Aluminum oxide ceramic substrate with high surface smoothness as well as preparation method and application of aluminum oxide ceramic substrate: Fid-Bau Portal

Aluminum oxide ceramic substrate with high surface smoothness as well as preparation method and application of aluminum oxide ceramic substrate

HU CHUANDENG / ZHANG XIANLI / LI SHANSHAN

Abstract

The invention discloses a high-surface-smoothness aluminum oxide ceramic substrate and a preparation method and application thereof, and belongs to the field of aluminum oxide ceramic substrates. The preparation method of the aluminum oxide ceramic substrate with high surface smoothness is characterized by comprising the following steps: pulping preparation raw materials to obtain slurry; the slurry is subjected to tape casting to obtain a green tape, and an optical-grade base material film is adopted in the tape casting process; the material of the optical-grade base material film comprises at least one of polyethylene glycol terephthalate, polyvinyl alcohol and cellulose triacetate; and performing isostatic pressing on the green tape, and sintering to obtain the aluminum oxide ceramic substrate with high surface smoothness. After the aluminum oxide ceramic substrate with high surface smoothness provided by the invention is subjected to tape casting, the surface of a tablet is smooth without micro pits, and the surface is smooth after sintering.

本发明公开了一种高表面光洁度氧化铝陶瓷基板及其制备方法及应用，属于氧化铝陶瓷基板领域。所述高表面光洁度氧化铝陶瓷基板的制备方法，其特征在于，包括以下步骤：将制备原料制浆，得到浆料；将所述浆料流延成型，得到生瓷带，其中所述流延成型的过程中采用光学级基材膜；所述光学级基材膜的材料包括聚对苯二甲酸乙二醇酯、聚乙烯醇、三醋酸纤维素中的至少一种；将所述生瓷带等静压后烧结，得到高表面光洁度氧化铝陶瓷基板。本发明提供的高表面光洁度氧化铝陶瓷基板流延后料片表面光滑无微坑，烧结后表面光滑。

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