Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Ceramic base and manufacturing method thereof
The present invention relates to a ceramic susceptor, and a method for manufacturing a ceramic susceptor according to the present invention comprises a manufacturing step of manufacturing a plurality of ceramic chips including via holes and conductors for filling the via holes, a stacking step of stacking the plurality of ceramic chips, and a sintering step of sintering a stacked body formed by the stacking, in the stacking step, the via hole of at least one of the plurality of ceramic sheets may be provided so as not to overlap with the via holes of the adjacent other ceramic sheets.
本发明涉及一种陶瓷基座，本发明的陶瓷基座的制造方法包括：制作步骤，制作包括导通孔及用于填充所述导通孔的导电体的多个陶瓷片，层叠步骤，层叠所述多个陶瓷片，以及烧结步骤，烧结通过所述层叠而成的层叠体；在所述层叠步骤中，所述多个陶瓷片中的至少一个陶瓷片的导通孔可设置成不与相邻的其他陶瓷片的导通孔重叠。
Ceramic base and manufacturing method thereof
The present invention relates to a ceramic susceptor, and a method for manufacturing a ceramic susceptor according to the present invention comprises a manufacturing step of manufacturing a plurality of ceramic chips including via holes and conductors for filling the via holes, a stacking step of stacking the plurality of ceramic chips, and a sintering step of sintering a stacked body formed by the stacking, in the stacking step, the via hole of at least one of the plurality of ceramic sheets may be provided so as not to overlap with the via holes of the adjacent other ceramic sheets.
本发明涉及一种陶瓷基座，本发明的陶瓷基座的制造方法包括：制作步骤，制作包括导通孔及用于填充所述导通孔的导电体的多个陶瓷片，层叠步骤，层叠所述多个陶瓷片，以及烧结步骤，烧结通过所述层叠而成的层叠体；在所述层叠步骤中，所述多个陶瓷片中的至少一个陶瓷片的导通孔可设置成不与相邻的其他陶瓷片的导通孔重叠。
Ceramic base and manufacturing method thereof
陶瓷基座及其制造方法
PARK JUNG-HYUN (Autor:in) / LEE JUN-SUNG (Autor:in)
10.12.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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