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High-thermal-conductivity silicon nitride ceramic material and preparation method thereof
The invention relates to the field of ceramic materials, in particular to a high-thermal-conductivity silicon nitride ceramic material and a preparation method of the high-thermal-conductivity silicon nitride ceramic material. The silicon nitride ceramic material is prepared from the following raw materials in parts by weight: 80 to 100 parts of silicon nitride, 5 to 10 parts of magnesium silicon nitride, 5 to 10 parts of yttrium oxide, 1 to 5 parts of fluoride, 1 to 3 parts of aluminum isopropoxide and 10 to 20 parts of binder. As a ceramic substrate material, the material can meet the application requirements of high calorific value and large thermal strain of semiconductor devices in the future.
本发明涉及陶瓷材料领域，具体为一种高导热氮化硅陶瓷材料及其制备方法，所述氮化硅陶瓷材料内部含有原位生成的氮化铝纳米线，由以下重量份数的原料制备而成：氮化硅80‑100份、氮化硅镁5‑10份、氧化钇5‑10份、氟化物1‑5份、异丙醇铝1‑3份、粘结剂10‑20份，经测试本发明所制备的氮化硅陶瓷材料具有较高的力学强度和优异的导热性能，作为陶瓷基板材料可以满足未来半导体器件高发热量、大热应变的应用需求。
High-thermal-conductivity silicon nitride ceramic material and preparation method thereof
The invention relates to the field of ceramic materials, in particular to a high-thermal-conductivity silicon nitride ceramic material and a preparation method of the high-thermal-conductivity silicon nitride ceramic material. The silicon nitride ceramic material is prepared from the following raw materials in parts by weight: 80 to 100 parts of silicon nitride, 5 to 10 parts of magnesium silicon nitride, 5 to 10 parts of yttrium oxide, 1 to 5 parts of fluoride, 1 to 3 parts of aluminum isopropoxide and 10 to 20 parts of binder. As a ceramic substrate material, the material can meet the application requirements of high calorific value and large thermal strain of semiconductor devices in the future.
本发明涉及陶瓷材料领域，具体为一种高导热氮化硅陶瓷材料及其制备方法，所述氮化硅陶瓷材料内部含有原位生成的氮化铝纳米线，由以下重量份数的原料制备而成：氮化硅80‑100份、氮化硅镁5‑10份、氧化钇5‑10份、氟化物1‑5份、异丙醇铝1‑3份、粘结剂10‑20份，经测试本发明所制备的氮化硅陶瓷材料具有较高的力学强度和优异的导热性能，作为陶瓷基板材料可以满足未来半导体器件高发热量、大热应变的应用需求。
High-thermal-conductivity silicon nitride ceramic material and preparation method thereof
一种高导热氮化硅陶瓷材料及其制备方法
FANG HAOJIE (Autor:in) / HE YIWEN (Autor:in) / ZHANG XIAOYUN (Autor:in) / ZHANG GUOXIU (Autor:in) / FANG MEILING (Autor:in) / LIU JIANPING (Autor:in) / ZENG XIONG (Autor:in)
21.01.2025
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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