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Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Provided is a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer (70) and electrodes (60, 80) provided on the piezoelectric layer (70) on an upper portion of a zirconium oxide layer (55), in which the zirconium oxide layer (55) is formed of granular crystal grains.
Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Provided is a liquid ejecting head including a piezoelectric element which includes a piezoelectric layer (70) and electrodes (60, 80) provided on the piezoelectric layer (70) on an upper portion of a zirconium oxide layer (55), in which the zirconium oxide layer (55) is formed of granular crystal grains.
Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and methods of manufacturing liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Flüssigkeitsausgabekopf, Flüssigkeitsausgabevorrichtung, piezoelektrisches Element und Verfahren zur Herstellung eines Flüssigkeitsausgabekopfes, einer Flüssigkeitsausgabevorrichtung und eines piezoelektrischen Elements
Tête d'éjection de liquide, appareil d'éjection de liquide, élément piézoélectrique et procédés de fabrication de tête d'éjection de liquide, appareil d'éjection de liquide et élément piézoélectrique
OHASHI KOJI (Autor:in) / ITAYAMA YASHUHIRO (Autor:in) / KUROKAWA KENICHI (Autor:in) / OSAWA EIJI (Autor:in) / NOGUCHI MOTOHISA (Autor:in)
30.11.2016
Patent
Elektronische Ressource
Englisch
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