Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
COMPLEX OXIDE SINTERED BODY, SPUTTERING TARGET, TRANSPARENT CONDUCTIVE OXIDE FILM, AND METHOD FOR PRODUCING SAME
The present invention provides a complex oxide sintered body 10 wherein Zr/(In + Zr + Y) is 0.05 to 4.5 at% and Y/(In + Zr + Y) is 0.005 to 0.5 at% in an atomic ratio when indium, zirconium, and yttrium are designated by In, Zr, and Y, respectively. Moreover, the present invention provides a sputtering target including the complex oxide sintered body 10 and a transparent conductive oxide film obtained by sputtering the sputtering target.
COMPLEX OXIDE SINTERED BODY, SPUTTERING TARGET, TRANSPARENT CONDUCTIVE OXIDE FILM, AND METHOD FOR PRODUCING SAME
The present invention provides a complex oxide sintered body 10 wherein Zr/(In + Zr + Y) is 0.05 to 4.5 at% and Y/(In + Zr + Y) is 0.005 to 0.5 at% in an atomic ratio when indium, zirconium, and yttrium are designated by In, Zr, and Y, respectively. Moreover, the present invention provides a sputtering target including the complex oxide sintered body 10 and a transparent conductive oxide film obtained by sputtering the sputtering target.
COMPLEX OXIDE SINTERED BODY, SPUTTERING TARGET, TRANSPARENT CONDUCTIVE OXIDE FILM, AND METHOD FOR PRODUCING SAME
KOMPLEXER OXIDSINTERKÖRPER, SPUTTERTARGET, TRANSPARENTE LEITENDE OXIDFOLIE UND HERSTELLUNGSVERFAHREN DAFÜR
CORPS FRITTÉ EN OXYDE COMPLEXE, CIBLE DE PULVÉRISATION, FILM CONDUCTEUR TRANSPARENT D'OXYDE ET PROCÉDÉ POUR LEUR PRODUCTION.
KURAMOCHI HIDETO (Autor:in) / TAMANO KIMIAKI (Autor:in) / IIGUSA HITOSHI (Autor:in) / AKIIKE RYO (Autor:in) / SHIBUTAMI TETSUO (Autor:in)
19.06.2019
Patent
Elektronische Ressource
Englisch
| Europäisches Patentamt | 2016
Europäisches Patentamt | 2019
Europäisches Patentamt | 2019
| Europäisches Patentamt | 2019
OXIDE SINTERED BODY, SPUTTERING TARGET, AND TRANSPARENT CONDUCTIVE FILM
| Europäisches Patentamt | 2019