OXIDE SINTERED BODY, PRODUCTION METHOD THEREFOR, TARGET, AND TRANSPARENT CONDUCTIVE FILM: Fid-Bau Portal

OXIDE SINTERED BODY, PRODUCTION METHOD THEREFOR, TARGET, AND TRANSPARENT CONDUCTIVE FILM

NAKAYAMA TOKUYUKI / ABE YOSHIYUKI

The present invention relates to an oxide sintered body consisting of an indium oxide and a cerium oxide, wherein the cerium content is 0.3 to 9% by atom characterized in that said oxide sintered body has an In 2 O 3 phase of a bixbyite structure as a main crystal phase, has a CeO 2 phase of a fluorite-type structure finely dispersed as crystal grains having an average particle diameter of equal to or smaller than 3 µm, as a second phase; a production method for an oxide sintered body; a target for sputtering obtained by fabricating the oxide sintered body; and a transparent conductive film characterized by being formed on a substrate by a sputtering method, using the target.

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OXIDE SINTERED BODY, PRODUCTION METHOD THEREFOR, TARGET, AND TRANSPARENT CONDUCTIVE FILM

NAKAYAMA TOKUYUKI / ABE YOSHIYUKI

Abstract

OXIDE SINTERED BODY, PRODUCTION METHOD THEREFOR, TARGET, AND TRANSPARENT CONDUCTIVE FILM

NAKAYAMA TOKUYUKI / ABE YOSHIYUKI

Abstract

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Dokumentinformationen

Titel:

OXIDE SINTERED BODY, PRODUCTION METHOD THEREFOR, TARGET, AND TRANSPARENT CONDUCTIVE FILM

Weitere Titelangaben:

OXIDSINTERKÖRPER, HERSTELLUNGSVERFAHREN DAFÜR, TARGET UND TRANSPARENTER LEITFÄHIGER FILM
CORPS FRITTÉ À BASE D'OXYDE, PROCÉDÉ DE PRODUCTION CORRESPONDANT, CIBLE ET FILM CONDUCTEUR TRANSPARENT

Beteiligte:

NAKAYAMA TOKUYUKI (Autor:in) / ABE YOSHIYUKI (Autor:in)

Erscheinungsdatum:

09.12.2015

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Englisch

Klassifikation:

IPC: C04B Kalk , LIME