Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SINTERED BODY COMPRISING LICOO2 SPUTTERING TARGET, AND PRODUCTION METHOD FOR SINTERED BODY COMPRISING LICOO2
Provided is a sintered body comprising LiCoO 2 used for a sputtering target. The area A of a surface of the sintered body that corresponds to a sputtering surface is 200 - 1500 cm 2 and the relative density of the entire sintered body is 75% or higher. When B1 represents the area of a region in which the area ratio that is occupied by pores is 10% or higher in the surface that corresponds to a sputtering surface, the ratio of B1 to the area A is 50% or higher, and the area B2 of a region having a specific resistance of 1.0 × 10 2 ©-cm or smaller in the surface that corresponds to a sputtering surface occupies 25% or more of the area A.
SINTERED BODY COMPRISING LICOO2 SPUTTERING TARGET, AND PRODUCTION METHOD FOR SINTERED BODY COMPRISING LICOO2
Provided is a sintered body comprising LiCoO 2 used for a sputtering target. The area A of a surface of the sintered body that corresponds to a sputtering surface is 200 - 1500 cm 2 and the relative density of the entire sintered body is 75% or higher. When B1 represents the area of a region in which the area ratio that is occupied by pores is 10% or higher in the surface that corresponds to a sputtering surface, the ratio of B1 to the area A is 50% or higher, and the area B2 of a region having a specific resistance of 1.0 × 10 2 ©-cm or smaller in the surface that corresponds to a sputtering surface occupies 25% or more of the area A.
SINTERED BODY COMPRISING LICOO2 SPUTTERING TARGET, AND PRODUCTION METHOD FOR SINTERED BODY COMPRISING LICOO2
SINTERKÖRPER MIT EINEM LICOO2-SPUTTERTARGET UND HERSTELLUNGSVERFAHREN FÜR DEN SINTERKÖRPER MIT LICOO2
CORPS FRITTÉ COMPRENANT DU DIOXYDE DE COBALT ETDE LITHIUM (LICOO2) CIBLE DE PUVÉRISATION ET PROCÉDE DE PRODUCTION D'UN CORPS FRITTÉ COMPRENANT DU DIOXYDE DE COBALT ET DE LITHIUM (LICOO2)
TAKETOMI YUICHI (Autor:in) / KANAMARU MORIYOSHI (Autor:in)
20.01.2016
Patent
Elektronische Ressource
Englisch
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C04B
Kalk
,
LIME
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H01M
Verfahren oder Mittel, z.B. Batterien, für die direkte Umwandlung von chemischer in elektrische Energie
,
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
Europäisches Patentamt | 2017
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