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LiCoO2-CONTAINING SINTERED BODY, LiCoO2-CONTAINING SPUTTERING TARGET, AND PRODUCTION METHOD OF LiCoO2-CONTAINING SINTERED BODY
PROBLEM TO BE SOLVED: To achieve hardly-broken and easily-handleable LiCoO-containing sintered body capable of quickening a deposition rate during sputtering, in particular, even when depositing only by pulse DC discharge sputtering, and suppressing generation of flake caused by sputtering.SOLUTION: LiCoO-containing sintered body is characterized by satisfying the whole following conditions: average crystal grain size is 10-40 μm, relative density is 90% or higher, and resistivity is 100 Ω-cm or less.SELECTED DRAWING: None
【課題】スパッタリング時、特にはパルスＤＣ放電スパッタリングでのみ成膜する場合であっても成膜レートを早めることができ、かつスパッタリングによるフレークの発生が抑えられ、更には割れにくく取り扱いやすいＬｉＣｏＯ2含有焼結体を実現する。【解決手段】上記ＬｉＣｏＯ2含有焼結体は、平均結晶粒径：１０〜４０μｍ、相対密度：９０％以上、および比抵抗：１００Ω・ｃｍ以下の全てを満たすところに特徴を有する。【選択図】なし
LiCoO2-CONTAINING SINTERED BODY, LiCoO2-CONTAINING SPUTTERING TARGET, AND PRODUCTION METHOD OF LiCoO2-CONTAINING SINTERED BODY
PROBLEM TO BE SOLVED: To achieve hardly-broken and easily-handleable LiCoO-containing sintered body capable of quickening a deposition rate during sputtering, in particular, even when depositing only by pulse DC discharge sputtering, and suppressing generation of flake caused by sputtering.SOLUTION: LiCoO-containing sintered body is characterized by satisfying the whole following conditions: average crystal grain size is 10-40 μm, relative density is 90% or higher, and resistivity is 100 Ω-cm or less.SELECTED DRAWING: None
【課題】スパッタリング時、特にはパルスＤＣ放電スパッタリングでのみ成膜する場合であっても成膜レートを早めることができ、かつスパッタリングによるフレークの発生が抑えられ、更には割れにくく取り扱いやすいＬｉＣｏＯ2含有焼結体を実現する。【解決手段】上記ＬｉＣｏＯ2含有焼結体は、平均結晶粒径：１０〜４０μｍ、相対密度：９０％以上、および比抵抗：１００Ω・ｃｍ以下の全てを満たすところに特徴を有する。【選択図】なし
LiCoO2-CONTAINING SINTERED BODY, LiCoO2-CONTAINING SPUTTERING TARGET, AND PRODUCTION METHOD OF LiCoO2-CONTAINING SINTERED BODY
ＬｉＣｏＯ２含有焼結体およびＬｉＣｏＯ２含有スパッタリングターゲット、並びにＬｉＣｏＯ２含有焼結体の製造方法
TAKETOMI YUICHI (Autor:in) / YOSHIDA SHINTARO (Autor:in) / KANAMARU MORIYOSHI (Autor:in)
20.04.2017
Patent
Elektronische Ressource
Japanisch
IPC:
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
C04B
Kalk
,
LIME
/
H01M
Verfahren oder Mittel, z.B. Batterien, für die direkte Umwandlung von chemischer in elektrische Energie
,
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
LiCoO2 CONTAINING SPUTTERING TARGET AND LiCoO2 CONTAINING SINTERED BODY
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