Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC MATERIAL ASSEMBLY FOR USE IN HIGHLY CORROSIVE OR EROSIVE INDUSTRIAL APPLICATIONS
A composite assembly of a relatively inexpensive ceramic, such as alumina, with a skin, or covering, of a high wear ceramic, such as sapphire, adapted to be used in semiconductor processing environments subjected to high levels of corrosion and/or erosion. The design life of the composite assembly may be significantly longer than previously used components. The composite assembly may have its ceramic pieces joined together with aluminum, such that the joint is not vulnerable to corrosive aspects to which the composite assembly may be exposed.
CERAMIC MATERIAL ASSEMBLY FOR USE IN HIGHLY CORROSIVE OR EROSIVE INDUSTRIAL APPLICATIONS
A composite assembly of a relatively inexpensive ceramic, such as alumina, with a skin, or covering, of a high wear ceramic, such as sapphire, adapted to be used in semiconductor processing environments subjected to high levels of corrosion and/or erosion. The design life of the composite assembly may be significantly longer than previously used components. The composite assembly may have its ceramic pieces joined together with aluminum, such that the joint is not vulnerable to corrosive aspects to which the composite assembly may be exposed.
CERAMIC MATERIAL ASSEMBLY FOR USE IN HIGHLY CORROSIVE OR EROSIVE INDUSTRIAL APPLICATIONS
KERAMISCHE MATERIALANORDNUNG ZUR VERWENDUNG IN HOCHKORROSIVEN ODER EROSIVEN INDUSTRIELLEN ANWENDUNGEN
ENSEMBLE MATÉRIAU CÉRAMIQUE DESTINÉ À ÊTRE UTILISÉ DANS DES APPLICATIONS INDUSTRIELLES HAUTEMENT CORROSIVES OU ÉROSIVES
ELLIOT BRENT (Autor:in) / REX DENNIS (Autor:in) / DYER TIM (Autor:in)
11.11.2020
Patent
Elektronische Ressource
Englisch
Ceramic Material Assembly For Use In Highly Corrosive Or Erosive Industrial Applications
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