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PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE PIEZOELECTRIC LAMINATE
There is provided a piezoelectric laminate (10), including: a substrate (1); a base layer (7) formed on the substrate (1); and a piezoelectric film (3) containing alkali niobium oxide and having a perovskite structure, which is formed on the base layer (7), as a polycrystalline film, and represented by a composition formula of (K1-xNax)NbO3 (0 < x < 1), wherein a crystal grain group forming the piezoelectric film (7) includes a crystal grain (8) having a ratio of 0.01 nm-1 or more and 0.1 nm-1 or less, which is the ratio of an outer peripheral length to a cross-sectional area when observing a cross-section of the crystal grain (8).
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE PIEZOELECTRIC LAMINATE
There is provided a piezoelectric laminate (10), including: a substrate (1); a base layer (7) formed on the substrate (1); and a piezoelectric film (3) containing alkali niobium oxide and having a perovskite structure, which is formed on the base layer (7), as a polycrystalline film, and represented by a composition formula of (K1-xNax)NbO3 (0 < x < 1), wherein a crystal grain group forming the piezoelectric film (7) includes a crystal grain (8) having a ratio of 0.01 nm-1 or more and 0.1 nm-1 or less, which is the ratio of an outer peripheral length to a cross-sectional area when observing a cross-section of the crystal grain (8).
PIEZOELECTRIC LAMINATE, PIEZOELECTRIC ELEMENT AND METHOD OF MANUFACTURING THE PIEZOELECTRIC LAMINATE
PIEZOELEKTRISCHES LAMINAT, PIEZOELEKTRISCHES ELEMENT UND VERFAHREN ZUR HERSTELLUNG DES PIEZOELEKTRISCHEN LAMINATS
STRATIFIÉ PIÉZOÉLECTRIQUE, ÉLÉMENT PIÉZOÉLECTRIQUE ET PROCÉDÉ DE FABRICATION DU STRATIFIÉ PIÉZOÉLECTRIQUE
SHIBATA KENJI (Autor:in) / WATANABE KAZUTOSHI (Autor:in) / KURODA TOSHIAKI (Autor:in)
06.01.2021
Patent
Elektronische Ressource
Englisch
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