Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT
To provide a piezoelectric laminate having high piezoelectric characteristics and comprising a piezoelectric film with high long-term stability, and a piezoelectric element.SOLUTION: There are provided a piezoelectric laminate and a piezoelectric element. The piezoelectric laminate comprises a lower electrode layer and a piezoelectric film in this order on a substrate. The piezoelectric laminate includes a seed layer consisting of a piezoelectric oxide between the lower electrode layer and the piezoelectric film, and the piezoelectric film contains a perovskite oxide expressed by the general formula I of Pb1-y2+αAy2{(Ti,Zr)1-x-y1 NbxB1y1}O3, where A is A site elements and one or more elements containing at least La; B1 is B site elements and one or more divalent or trivalent elements; O is an oxygen element; and x, y1, y2 and α satisfy 0.05
【課題】高い圧電特性を有し、かつ、長期安定性の高い圧電膜を備えた圧電積層体及び圧電素子を得る。【解決手段】圧電積層体及び圧電素子は、基板上に、下部電極層、及び圧電膜をこの順に備えた圧電積層体において、下部電極層と圧電膜との間に、導電性酸化物からなるシード層を備え、圧電膜は、下記一般式Ｉで表されるペロブスカイト型酸化物を含む。Ｐｂ１－ｙ２＋αＡｙ２｛（Ｔｉ，Ｚｒ）１－ｘ－ｙ１ＮｂｘＢ１ｙ１｝Ｏ３一般式Ｉここで、ＡはＡサイト元素であって、少なくともＬａを含む１つ以上の元素であり、Ｂ１はＢサイト元素であって、２価もしくは３価の１つ以上の元素であり、Ｏは酸素元素であり、ｘ、ｙ１、ｙ２、αは、０．０５＜ｘ≦０．３、０．２ｘ≦ｙ１＋ｙ２≦０．５ｘ、０≦ｙ１≦０．１５、０≦ｙ２≦０．１５、０≦α≦０．２を満たす。【選択図】図１
PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT
To provide a piezoelectric laminate having high piezoelectric characteristics and comprising a piezoelectric film with high long-term stability, and a piezoelectric element.SOLUTION: There are provided a piezoelectric laminate and a piezoelectric element. The piezoelectric laminate comprises a lower electrode layer and a piezoelectric film in this order on a substrate. The piezoelectric laminate includes a seed layer consisting of a piezoelectric oxide between the lower electrode layer and the piezoelectric film, and the piezoelectric film contains a perovskite oxide expressed by the general formula I of Pb1-y2+αAy2{(Ti,Zr)1-x-y1 NbxB1y1}O3, where A is A site elements and one or more elements containing at least La; B1 is B site elements and one or more divalent or trivalent elements; O is an oxygen element; and x, y1, y2 and α satisfy 0.05
【課題】高い圧電特性を有し、かつ、長期安定性の高い圧電膜を備えた圧電積層体及び圧電素子を得る。【解決手段】圧電積層体及び圧電素子は、基板上に、下部電極層、及び圧電膜をこの順に備えた圧電積層体において、下部電極層と圧電膜との間に、導電性酸化物からなるシード層を備え、圧電膜は、下記一般式Ｉで表されるペロブスカイト型酸化物を含む。Ｐｂ１－ｙ２＋αＡｙ２｛（Ｔｉ，Ｚｒ）１－ｘ－ｙ１ＮｂｘＢ１ｙ１｝Ｏ３一般式Ｉここで、ＡはＡサイト元素であって、少なくともＬａを含む１つ以上の元素であり、Ｂ１はＢサイト元素であって、２価もしくは３価の１つ以上の元素であり、Ｏは酸素元素であり、ｘ、ｙ１、ｙ２、αは、０．０５＜ｘ≦０．３、０．２ｘ≦ｙ１＋ｙ２≦０．５ｘ、０≦ｙ１≦０．１５、０≦ｙ２≦０．１５、０≦α≦０．２を満たす。【選択図】図１
PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT
圧電積層体及び圧電素子
KOBAYASHI HIROYUKI (Autor:in) / NAKAMURA SEIGO (Autor:in)
25.01.2024
Patent
Elektronische Ressource
Japanisch
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