Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
BONDED SUBSTRATE, AND METHOD FOR MANUFACTURING BONDED SUBSTRATE
A bonded substrate includes: a silicon nitride ceramic substrate; a copper plate; and a bonding layer bonding the copper plate to the silicon nitride ceramic substrate, wherein the bonding layer has a first interface in contact with the silicon nitride ceramic substrate and a second interface in contact with the copper plate, and contains a nitride and a silicide of an active metal as at least one metal selected from the group consisting of titanium and zirconium, an atomic fraction of nitrogen of the bonding layer is greatest at the first interface and is smallest at the second interface, and a sum of atomic fractions of the active metal and silicon of the bonding layer is smallest at the first interface and is greatest at the second interface.
BONDED SUBSTRATE, AND METHOD FOR MANUFACTURING BONDED SUBSTRATE
A bonded substrate includes: a silicon nitride ceramic substrate; a copper plate; and a bonding layer bonding the copper plate to the silicon nitride ceramic substrate, wherein the bonding layer has a first interface in contact with the silicon nitride ceramic substrate and a second interface in contact with the copper plate, and contains a nitride and a silicide of an active metal as at least one metal selected from the group consisting of titanium and zirconium, an atomic fraction of nitrogen of the bonding layer is greatest at the first interface and is smallest at the second interface, and a sum of atomic fractions of the active metal and silicon of the bonding layer is smallest at the first interface and is greatest at the second interface.
BONDED SUBSTRATE, AND METHOD FOR MANUFACTURING BONDED SUBSTRATE
GEBUNDENES SUBSTRAT UND VERFAHREN ZUR HERSTELLUNG EINES GEBUNDENEN SUBSTRATS
SUBSTRAT LIÉ ET PROCÉDÉ DE FABRICATION D'UN SUBSTRAT LIÉ
EBIGASE TAKASHI (Autor:in)
06.09.2023
Patent
Elektronische Ressource
Englisch
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