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SILICON CARBIDE POWDER, METHOD FOR MANUFACTURING SILICON CARBIDE INGOT USING THE SAME, AND SILICON CARBIDE WAFER
Disclosed are a silicon carbide powder, a method of manufacturing a silicon carbide powder, and a silicon carbide wafer. More particularly, the silicon carbide powder includes carbon and silicon and in the silicon carbide powder, O1s/C1s of a surface measured by X-ray photoelectron spectroscopy is 0.28 or less.
SILICON CARBIDE POWDER, METHOD FOR MANUFACTURING SILICON CARBIDE INGOT USING THE SAME, AND SILICON CARBIDE WAFER
Disclosed are a silicon carbide powder, a method of manufacturing a silicon carbide powder, and a silicon carbide wafer. More particularly, the silicon carbide powder includes carbon and silicon and in the silicon carbide powder, O1s/C1s of a surface measured by X-ray photoelectron spectroscopy is 0.28 or less.
SILICON CARBIDE POWDER, METHOD FOR MANUFACTURING SILICON CARBIDE INGOT USING THE SAME, AND SILICON CARBIDE WAFER
SILICIUMCARBIDPULVER, VERFAHREN ZUR HERSTELLUNG EINES SILICIUMCARBIDBLOCKS DAMIT UND SILICIUMCARBIDWAFER
POUDRE DE CARBURE DE SILICIUM, PROCÉDÉ DE FABRICATION D'UN LINGOT DE CARBURE DE SILICIUM L'UTILISANT ET TRANCHE DE CARBURE DE SILICIUM
PARK JONG HWI (Autor:in) / KU KAP RYEOL (Autor:in) / KIM JUNG GYU (Autor:in) / CHOI JUNG WOO (Autor:in) / SEO JUNG DOO (Autor:in) / KYUN MYUNG OK (Autor:in)
01.11.2023
Patent
Elektronische Ressource
Englisch
SILICON CARBIDE POWDER, COMPOSITION USING SAME, AND METHOD FOR MANUFACTURING SILICON CARBIDE POWDER
Europäisches Patentamt | 2022
|Europäisches Patentamt | 2017
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