Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PROCEDE D'INFILTRATION OU DE DEPOT CHIMIQUE EN PHASE VAPEUR
A method of chemical vapor infiltration or deposition includes forming silicon carbide in pores of a porous substrate or on a surface of a substrate, the substrate being placed in a reaction enclosure, the silicon carbide being formed from a gas phase introduced into the reaction enclosure, the gas phase including a reagent compound that is a precursor of silicon carbide and that has the following formulain which n is an integer equal to 0 or 1; m is an integer lying in the range 1 to 3; p is an integer lying in the range 0 to 2 with m+p=3; and R designates —H or —CH3; a ratio C/Si between the number of carbon atoms and the number of silicon atoms in the introduced gas phase lying in the range 2 to 3.
PROCEDE D'INFILTRATION OU DE DEPOT CHIMIQUE EN PHASE VAPEUR
A method of chemical vapor infiltration or deposition includes forming silicon carbide in pores of a porous substrate or on a surface of a substrate, the substrate being placed in a reaction enclosure, the silicon carbide being formed from a gas phase introduced into the reaction enclosure, the gas phase including a reagent compound that is a precursor of silicon carbide and that has the following formulain which n is an integer equal to 0 or 1; m is an integer lying in the range 1 to 3; p is an integer lying in the range 0 to 2 with m+p=3; and R designates —H or —CH3; a ratio C/Si between the number of carbon atoms and the number of silicon atoms in the introduced gas phase lying in the range 2 to 3.
PROCEDE D'INFILTRATION OU DE DEPOT CHIMIQUE EN PHASE VAPEUR
GOUJARD STEPHANE (Autor:in) / DELCAMP ADRIEN (Autor:in) / DESCAMPS CEDRIC (Autor:in)
27.07.2018
Patent
Elektronische Ressource
Französisch
PROCEDE D'INFILTRATION OU DE DEPOT CHIMIQUE EN PHASE VAPEUR
| Europäisches Patentamt | 2021
PROCEDE D'INFILTRATION OU DE DEPOT CHIMIQUE EN PHASE VAPEUR
| Europäisches Patentamt | 2020
PROCÉDÉ D'INFILTRATION OU DE DÉPÔT CHIMIQUE EN PHASE VAPEUR
| Europäisches Patentamt | 2022
Procédé d’infiltration ou de dépôt chimique en phase vapeur
| Europäisches Patentamt | 2021
| Europäisches Patentamt | 2018