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REACTION SINTERED SILICON CARBIDE MEMBER
PROBLEM TO BE SOLVED: To provide a reaction sintered silicon carbide member making it possible to produce a large-sized ceramic member having a complicated shape, or to restrain the generation of particles.SOLUTION: The reaction sintered silicon carbide member comprises: a first member containing reaction sintered silicon carbide; a second member containing reaction sintered silicon carbide and having a first face, a second face opposite to the first face, and a first end face connected to the first and second faces; and a joining portion which joins the first and second members to each other. The joining portion includes: an intermediate region which joins the first member and the first end face to each other and contains reaction sintered silicon carbide; and a first region which joins the first member, the first face and the intermediate region to each other and contains reaction sintered silicon carbide.
【課題】大型かつ複雑な形状のセラミック部材の作製を行うことができる、あるいはパーティクルの発生が抑えられる反応焼結炭化珪素部材を提供することを目的とする。【解決手段】反応焼結炭化珪素を含む第1部材と、第1面と、前記第1面とは反対側の第2面と、前記第1面と前記第2面とに繋がる第1端面と、を有し反応焼結炭化珪素を含む第2部材と、前記第1部材と前記第2部材とを接合する接合部であって、前記第1部材と前記第1端面とを接合し反応焼結炭化珪素を含む中間領域と、前記第1部材と前記第1面と前記中間領域とを接合し反応焼結炭化珪素を含む第1領域と、を含む接合部と、を備えた反応焼結炭化珪素部材が提供される。【選択図】図1
REACTION SINTERED SILICON CARBIDE MEMBER
PROBLEM TO BE SOLVED: To provide a reaction sintered silicon carbide member making it possible to produce a large-sized ceramic member having a complicated shape, or to restrain the generation of particles.SOLUTION: The reaction sintered silicon carbide member comprises: a first member containing reaction sintered silicon carbide; a second member containing reaction sintered silicon carbide and having a first face, a second face opposite to the first face, and a first end face connected to the first and second faces; and a joining portion which joins the first and second members to each other. The joining portion includes: an intermediate region which joins the first member and the first end face to each other and contains reaction sintered silicon carbide; and a first region which joins the first member, the first face and the intermediate region to each other and contains reaction sintered silicon carbide.
【課題】大型かつ複雑な形状のセラミック部材の作製を行うことができる、あるいはパーティクルの発生が抑えられる反応焼結炭化珪素部材を提供することを目的とする。【解決手段】反応焼結炭化珪素を含む第1部材と、第1面と、前記第1面とは反対側の第2面と、前記第1面と前記第2面とに繋がる第1端面と、を有し反応焼結炭化珪素を含む第2部材と、前記第1部材と前記第2部材とを接合する接合部であって、前記第1部材と前記第1端面とを接合し反応焼結炭化珪素を含む中間領域と、前記第1部材と前記第1面と前記中間領域とを接合し反応焼結炭化珪素を含む第1領域と、を含む接合部と、を備えた反応焼結炭化珪素部材が提供される。【選択図】図1
REACTION SINTERED SILICON CARBIDE MEMBER
反応焼結炭化珪素部材
AMANO KAZUTAKA (Autor:in) / IDE TAKAYUKI (Autor:in) / SHIMADA SHOGO (Autor:in)
05.11.2015
Patent
Elektronische Ressource
Japanisch
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