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FIRING JIG AND FIRING METHOD
PROBLEM TO BE SOLVED: To provide a firing jig and a firing method which allow the whole of a substrate to be uniformly contracted and heated.SOLUTION: A firing jig according to one aspect of an embodiment includes a setter having a mounting surface on which an object to be fired is mounted. When the mounting surface of the setter is viewed from the top, the thermal capacity per unit area in a central part of a mounting area in which the object to be fired is mounted is smaller than the thermal capacity per unit area in a part other than the central part of the mounting area.SELECTED DRAWING: Figure 6
【課題】基板全体に対して均等に収縮させ、全体に均等に熱を加えることのできる焼成治具および焼成方法を提供する。【解決手段】実施形態の一態様に係る焼成治具は、被焼成物が載置される載置面を有するセッターを備える。セッターの載置面を上面視した場合において、被焼成物が載置される載置領域の中心部における単位面積当たりの熱容量が、載置領域のうち中心部以外の部分における単位面積当たりの熱容量よりも小さくなっている。【選択図】図6
FIRING JIG AND FIRING METHOD
PROBLEM TO BE SOLVED: To provide a firing jig and a firing method which allow the whole of a substrate to be uniformly contracted and heated.SOLUTION: A firing jig according to one aspect of an embodiment includes a setter having a mounting surface on which an object to be fired is mounted. When the mounting surface of the setter is viewed from the top, the thermal capacity per unit area in a central part of a mounting area in which the object to be fired is mounted is smaller than the thermal capacity per unit area in a part other than the central part of the mounting area.SELECTED DRAWING: Figure 6
【課題】基板全体に対して均等に収縮させ、全体に均等に熱を加えることのできる焼成治具および焼成方法を提供する。【解決手段】実施形態の一態様に係る焼成治具は、被焼成物が載置される載置面を有するセッターを備える。セッターの載置面を上面視した場合において、被焼成物が載置される載置領域の中心部における単位面積当たりの熱容量が、載置領域のうち中心部以外の部分における単位面積当たりの熱容量よりも小さくなっている。【選択図】図6
FIRING JIG AND FIRING METHOD
焼成治具および焼成方法
UCHIDA TATSUHIKO (Autor:in) / TSUTSUMI HIDEKI (Autor:in) / UCHINO TETSUYA (Autor:in)
12.05.2016
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME
/
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
CASE USED FOR FIRING GRAPHITE MATERIAL FIRING CONTAINER AND FIRING METHOD
Europäisches Patentamt | 2015
Engineering Index Backfile | 1944