Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT INCLUDING THE SAME, AND LIQUID DISCHARGE DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric film with high piezoelectricity; a piezoelectric element including such a piezoelectric film; and a liquid discharge device.SOLUTION: A piezoelectric film of the present invention is one grown by vapor phase growth. The piezoelectric film comprises: a perovskite type oxide arranged by doping a perovskite type oxide expressed by the general formula P below with Si by 0.2-0.5 mol%. The ratio of the peak intensity of a pyrochlore phase to the total of peak intensities of perovskite phases in (100)-, (001)-, (110)-, (101)- and (111)-planes which are measured by X-ray diffraction method is 0.25 or less. General Formula P: A[(ZrTi)Nb]O, where A is an A site element including Pb as a primary component; Zr, Ti, and Nb are each a B site element; x is between 0 and 1; a is 0.1 to less than 0.3.SELECTED DRAWING: Figure 6
【課題】圧電特性が高い圧電体膜及びその圧電体膜を備えた圧電素子及び液体吐出装置を提供する。【解決手段】本発明の圧電体膜は、気相成長法により成膜されてなる圧電体膜であって、下記一般式Ｐで表されるペロブスカイト型酸化物にＳｉが０．２ｍｏｌ％以上０．５ｍｏｌ％以下ドープされてなるペロブスカイト型酸化物を含み、Ｘ線回折法により測定されたペロブスカイト相の（１００）、（００１）、（１１０）、（１０１）及び（１１１）の各面方位におけるピーク強度の総和に対するパイロクロア相のピーク強度の比が０．２５以下である。Ａ１＋δ［（ＺｒｘＴｉ１−ｘ）１−ａＮｂａ］Ｏｙ・・・一般式Ｐ但し、式Ｐ中、ＡはＰｂを主成分とするＡサイト元素、Ｚｒ，Ｔｉ，及びＮｂはＢサイト元素。ｘは０超１未満、ａは０．１以上０．３未満。【選択図】図６
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT INCLUDING THE SAME, AND LIQUID DISCHARGE DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric film with high piezoelectricity; a piezoelectric element including such a piezoelectric film; and a liquid discharge device.SOLUTION: A piezoelectric film of the present invention is one grown by vapor phase growth. The piezoelectric film comprises: a perovskite type oxide arranged by doping a perovskite type oxide expressed by the general formula P below with Si by 0.2-0.5 mol%. The ratio of the peak intensity of a pyrochlore phase to the total of peak intensities of perovskite phases in (100)-, (001)-, (110)-, (101)- and (111)-planes which are measured by X-ray diffraction method is 0.25 or less. General Formula P: A[(ZrTi)Nb]O, where A is an A site element including Pb as a primary component; Zr, Ti, and Nb are each a B site element; x is between 0 and 1; a is 0.1 to less than 0.3.SELECTED DRAWING: Figure 6
【課題】圧電特性が高い圧電体膜及びその圧電体膜を備えた圧電素子及び液体吐出装置を提供する。【解決手段】本発明の圧電体膜は、気相成長法により成膜されてなる圧電体膜であって、下記一般式Ｐで表されるペロブスカイト型酸化物にＳｉが０．２ｍｏｌ％以上０．５ｍｏｌ％以下ドープされてなるペロブスカイト型酸化物を含み、Ｘ線回折法により測定されたペロブスカイト相の（１００）、（００１）、（１１０）、（１０１）及び（１１１）の各面方位におけるピーク強度の総和に対するパイロクロア相のピーク強度の比が０．２５以下である。Ａ１＋δ［（ＺｒｘＴｉ１−ｘ）１−ａＮｂａ］Ｏｙ・・・一般式Ｐ但し、式Ｐ中、ＡはＰｂを主成分とするＡサイト元素、Ｚｒ，Ｔｉ，及びＮｂはＢサイト元素。ｘは０超１未満、ａは０．１以上０．３未満。【選択図】図６
PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT INCLUDING THE SAME, AND LIQUID DISCHARGE DEVICE
圧電体膜及びそれを備えた圧電素子、及び液体吐出装置
MURAKAMI NAOKI (Autor:in)
02.06.2016
Patent
Elektronische Ressource
Japanisch
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