Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
LAMINATE TRANSPARENT CONDUCTIVE FILM, LAMINATE WIRING FILM, AND MANUFACTURING METHOD FOR LAMINATE WIRING FILM
PROBLEM TO BE SOLVED: To provide a laminate transparent conductive film having sufficient high transmissivity and a sufficiently low electric resistance.SOLUTION: A laminate transparent conductive film comprises: a GaOfilm 11 formed as a ground layer on the surface of a substrate 20; an Ag alloy film 12 formed over the GaOfilm 11; and a transparent conductive oxide film 13 formed over the Ag alloy film 12. The Ag alloy film 12 contains one kind or two kinds of In, Sn and Sb by 0.2 atom % or more and 1.5 atom % or less in total, and the remainder being constituted of an Ag alloy made of Ag and an inevitable impurity.SELECTED DRAWING: Figure 1
【課題】透過率が十分に高く、かつ、電気抵抗が十分に低い積層透明導電膜を提供する。【解決手段】基材２０の表面に下地層として成膜されるＧａ２Ｏ３膜１１と、このＧａ２Ｏ３膜１１上に成膜されたＡｇ合金膜１２と、このＡｇ合金膜１２上に成膜された透明導電酸化物膜１３と、を備えており、Ａｇ合金膜１２は、Ｉｎ，Ｓｎ，Ｓｂのうちの１種又は２種以上を合計で０．２原子％以上１．５原子％以下含有し、残部がＡｇ及び不可避不純物からなるＡｇ合金で構成されていることを特徴とする。【選択図】図１
LAMINATE TRANSPARENT CONDUCTIVE FILM, LAMINATE WIRING FILM, AND MANUFACTURING METHOD FOR LAMINATE WIRING FILM
PROBLEM TO BE SOLVED: To provide a laminate transparent conductive film having sufficient high transmissivity and a sufficiently low electric resistance.SOLUTION: A laminate transparent conductive film comprises: a GaOfilm 11 formed as a ground layer on the surface of a substrate 20; an Ag alloy film 12 formed over the GaOfilm 11; and a transparent conductive oxide film 13 formed over the Ag alloy film 12. The Ag alloy film 12 contains one kind or two kinds of In, Sn and Sb by 0.2 atom % or more and 1.5 atom % or less in total, and the remainder being constituted of an Ag alloy made of Ag and an inevitable impurity.SELECTED DRAWING: Figure 1
【課題】透過率が十分に高く、かつ、電気抵抗が十分に低い積層透明導電膜を提供する。【解決手段】基材２０の表面に下地層として成膜されるＧａ２Ｏ３膜１１と、このＧａ２Ｏ３膜１１上に成膜されたＡｇ合金膜１２と、このＡｇ合金膜１２上に成膜された透明導電酸化物膜１３と、を備えており、Ａｇ合金膜１２は、Ｉｎ，Ｓｎ，Ｓｂのうちの１種又は２種以上を合計で０．２原子％以上１．５原子％以下含有し、残部がＡｇ及び不可避不純物からなるＡｇ合金で構成されていることを特徴とする。【選択図】図１
LAMINATE TRANSPARENT CONDUCTIVE FILM, LAMINATE WIRING FILM, AND MANUFACTURING METHOD FOR LAMINATE WIRING FILM
積層透明導電膜、積層配線膜及び積層配線膜の製造方法
NAKAZAWA HIROMI (Autor:in) / ISHII HIROSHI (Autor:in)
08.09.2016
Patent
Elektronische Ressource
Japanisch
MANUFACTURING METHOD FOR WINDOW TRANSPARENT LAMINATE FILM
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