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TARGET FOR PRODUCING OXIDE SUPERCONDUCTING THIN FILM, AND PRODUCTION METHOD OF OXIDE SUPERCONDUCTING WIRE
PROBLEM TO BE SOLVED: To provide a target capable of depositing an oxide superconducting thin film having uniform superconducting property, even when performing deposition for a long time for producing a long-sized oxide superconducting wire.SOLUTION: There is provided a target for producing an oxide superconducting thin film expressed as REBaCuO(RE is a rare-earth element). Concerning the target for producing the oxide superconducting thin film, the target comprises a sintered body obtained by sintering a compact of base powder containing a RE compound, a Ba compound and a Cu compound, and the sintered body has pores having a porosity of 20% or less and a maximum pore diameter of 10 μm or less.SELECTED DRAWING: Figure 3
【課題】本発明は、長尺の酸化物超電導線材を製造するために長時間成膜を行った場合であっても、超電導特性が均一な酸化物超電導薄膜を成膜することが可能なターゲットの提供を目的とする。【解決手段】本発明は、REBa2Cu3OX(REは希土類元素)で表される酸化物超電導薄膜の作製用ターゲットであって、前記ターゲットはRE化合物、Ba化合物、Cu化合物を含む原料粉末の成形体を焼結してなる焼結体からなり、前記焼結体は20%以下の気孔率を有し、最大気孔径が10μm以下の気孔を有する酸化物超電導薄膜の作製用ターゲットに関する。【選択図】図3
TARGET FOR PRODUCING OXIDE SUPERCONDUCTING THIN FILM, AND PRODUCTION METHOD OF OXIDE SUPERCONDUCTING WIRE
PROBLEM TO BE SOLVED: To provide a target capable of depositing an oxide superconducting thin film having uniform superconducting property, even when performing deposition for a long time for producing a long-sized oxide superconducting wire.SOLUTION: There is provided a target for producing an oxide superconducting thin film expressed as REBaCuO(RE is a rare-earth element). Concerning the target for producing the oxide superconducting thin film, the target comprises a sintered body obtained by sintering a compact of base powder containing a RE compound, a Ba compound and a Cu compound, and the sintered body has pores having a porosity of 20% or less and a maximum pore diameter of 10 μm or less.SELECTED DRAWING: Figure 3
【課題】本発明は、長尺の酸化物超電導線材を製造するために長時間成膜を行った場合であっても、超電導特性が均一な酸化物超電導薄膜を成膜することが可能なターゲットの提供を目的とする。【解決手段】本発明は、REBa2Cu3OX(REは希土類元素)で表される酸化物超電導薄膜の作製用ターゲットであって、前記ターゲットはRE化合物、Ba化合物、Cu化合物を含む原料粉末の成形体を焼結してなる焼結体からなり、前記焼結体は20%以下の気孔率を有し、最大気孔径が10μm以下の気孔を有する酸化物超電導薄膜の作製用ターゲットに関する。【選択図】図3
TARGET FOR PRODUCING OXIDE SUPERCONDUCTING THIN FILM, AND PRODUCTION METHOD OF OXIDE SUPERCONDUCTING WIRE
酸化物超電導薄膜作製用ターゲットおよび酸化物超電導線材の製造方法
HIRATA WATARU (Autor:in)
04.11.2016
Patent
Elektronische Ressource
Japanisch
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