Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
LiCoO2-CONTAINING SINTERED BODY AND TUBULAR SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide a tubular sintered body containing LiCoO, which is hard to shatter at the time of processing, etc.SOLUTION: This invention relates to a sintered body 100 that contains LiCoO, and has a tubular shape 100 including a hollow part defined by the inner peripheral surface thereof, wherein a central region 6 within a range of 15-70% of the distance between the outer peripheral surface and the inner peripheral surface has a porosity of 15-34% in a region at least 80% of the height of the tubular sintered body 100. Formula (1): 200≤(Do+Di)×π×L/200≤950, wherein, Do represents the outer diameter [mm] of the sintered body 100, Di represents the inner diameter [mm] of the sintered body 100, and L represents the height [mm] of the sintered body 100.SELECTED DRAWING: Figure 1
【課題】加工時等に割れにくいＬｉＣｏＯ２を含有する円筒形焼結体の提供。【解決手段】ＬｉＣｏＯ２を含有し、内周面２で規定される中空部を含んだ円筒形状１００を有し、外周面１から内周面２に至る距離の１５〜７０％の範囲である中心領域６の気孔率が、円筒形焼結体１００の高さの８０％以上に亘って、１５〜３４％であり、下記（１）式を満足する焼結体１００。２００≦（Ｄｏ＋Ｄｉ）×π×Ｌ／２００≦９５０・・・（１）（Ｄｏは焼結体１００の外径［ｍｍ］、Ｄｉは焼結体１００の内径［ｍｍ］、Ｌは焼結体１００の高さ［ｍｍ］）【選択図】図１
LiCoO2-CONTAINING SINTERED BODY AND TUBULAR SPUTTERING TARGET
PROBLEM TO BE SOLVED: To provide a tubular sintered body containing LiCoO, which is hard to shatter at the time of processing, etc.SOLUTION: This invention relates to a sintered body 100 that contains LiCoO, and has a tubular shape 100 including a hollow part defined by the inner peripheral surface thereof, wherein a central region 6 within a range of 15-70% of the distance between the outer peripheral surface and the inner peripheral surface has a porosity of 15-34% in a region at least 80% of the height of the tubular sintered body 100. Formula (1): 200≤(Do+Di)×π×L/200≤950, wherein, Do represents the outer diameter [mm] of the sintered body 100, Di represents the inner diameter [mm] of the sintered body 100, and L represents the height [mm] of the sintered body 100.SELECTED DRAWING: Figure 1
【課題】加工時等に割れにくいＬｉＣｏＯ２を含有する円筒形焼結体の提供。【解決手段】ＬｉＣｏＯ２を含有し、内周面２で規定される中空部を含んだ円筒形状１００を有し、外周面１から内周面２に至る距離の１５〜７０％の範囲である中心領域６の気孔率が、円筒形焼結体１００の高さの８０％以上に亘って、１５〜３４％であり、下記（１）式を満足する焼結体１００。２００≦（Ｄｏ＋Ｄｉ）×π×Ｌ／２００≦９５０・・・（１）（Ｄｏは焼結体１００の外径［ｍｍ］、Ｄｉは焼結体１００の内径［ｍｍ］、Ｌは焼結体１００の高さ［ｍｍ］）【選択図】図１
LiCoO2-CONTAINING SINTERED BODY AND TUBULAR SPUTTERING TARGET
ＬｉＣｏＯ２を含有する焼結体および円筒形スパッタリングターゲット
TAKETOMI YUICHI (Autor:in) / KANAMARU MORIYOSHI (Autor:in)
01.02.2018
Patent
Elektronische Ressource
Japanisch
LiCoO2-CONTAINING SINTERED BODY AND TUBULAR SPUTTERING TARGET
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