Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
RARE EARTH OXIDE-BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION
PROBLEM TO BE SOLVED: To provide a manufacturing method of an article containing a body coated by ceramic coating.SOLUTION: There is provided a manufacturing method of an article including a process 210 for coating at least one surface of a body, where the body contains at least one of ceramic or aluminum, copper, magnesium, ceramic coating contains YOin a range of about 45 to about 99 mol%, ZrOin a range of about 0 to about 55, AlOin a range of about 0 to about 10 mol% or the ceramic coating alternatively contains YOin a range of about 30 o about 60 mol%, ZrOin a range of about 0 to about 20 and AlOin a range of about 30 to about 60 mol%. There is provided a method including a process for conducting ceramic coating on at least one surface of the body by plasma spray, where the coating has thickness of about 5 to about 25 mill.SELECTED DRAWING: Figure 2
【課題】セラミックスコーティングでコーティングされる本体を含む物品の製造方法の提供。【解決手段】本体は、セラミック又はアルミニウム、銅、マグネシウムのうち少なくとも１つを含み、セラミックコーティングは、約４５〜約９９モル％の範囲内のＹ２Ｏ３と、約０〜約５５モル％の範囲内のＺｒＯ２と、約０〜約１０モル％の範囲内のＡｌ２Ｏ３を含み、又、セラミックコーティングは、代替的に、約３０〜約６０モル％の範囲内のＹ２Ｏ３と、約０〜約２０モル％の範囲内のＺｒＯ２と、約３０〜約６０モル％の範囲内のＡｌ２Ｏ３を含み、本体の少なくとも１つの表面をコーティングする工程２１０を含む物品の製造方法。コーティングは約５〜約２５ミルの厚さを有し、本体の少なくとも１つの表面をプラズマ溶射によりセラミックスコーティングを行う工程を、含む、方法。【選択図】図２
RARE EARTH OXIDE-BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION
PROBLEM TO BE SOLVED: To provide a manufacturing method of an article containing a body coated by ceramic coating.SOLUTION: There is provided a manufacturing method of an article including a process 210 for coating at least one surface of a body, where the body contains at least one of ceramic or aluminum, copper, magnesium, ceramic coating contains YOin a range of about 45 to about 99 mol%, ZrOin a range of about 0 to about 55, AlOin a range of about 0 to about 10 mol% or the ceramic coating alternatively contains YOin a range of about 30 o about 60 mol%, ZrOin a range of about 0 to about 20 and AlOin a range of about 30 to about 60 mol%. There is provided a method including a process for conducting ceramic coating on at least one surface of the body by plasma spray, where the coating has thickness of about 5 to about 25 mill.SELECTED DRAWING: Figure 2
【課題】セラミックスコーティングでコーティングされる本体を含む物品の製造方法の提供。【解決手段】本体は、セラミック又はアルミニウム、銅、マグネシウムのうち少なくとも１つを含み、セラミックコーティングは、約４５〜約９９モル％の範囲内のＹ２Ｏ３と、約０〜約５５モル％の範囲内のＺｒＯ２と、約０〜約１０モル％の範囲内のＡｌ２Ｏ３を含み、又、セラミックコーティングは、代替的に、約３０〜約６０モル％の範囲内のＹ２Ｏ３と、約０〜約２０モル％の範囲内のＺｒＯ２と、約３０〜約６０モル％の範囲内のＡｌ２Ｏ３を含み、本体の少なくとも１つの表面をコーティングする工程２１０を含む物品の製造方法。コーティングは約５〜約２５ミルの厚さを有し、本体の少なくとも１つの表面をプラズマ溶射によりセラミックスコーティングを行う工程を、含む、方法。【選択図】図２
RARE EARTH OXIDE-BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION
半導体アプリケーション用希土類酸化物系耐食性コーティング
JENNIFER Y SUN (Autor:in) / BIRAJA P KANUNGO (Autor:in) / TOM CHO (Autor:in)
08.06.2017
Patent
Elektronische Ressource
Japanisch
RARE EARTH OXIDE BASED CORROSION RESISTANT COATING FOR SEMICONDUCTOR APPLICATION
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