METHOD FOR PRODUCING OXIDE SINTERED BODY: Fid-Bau Portal

Fachinformationsdienst BAUdigital

Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik

METHOD FOR PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / WATAYA KENICHI / KURISU KENICHI / SOGABE KOICHI

PROBLEM TO BE SOLVED: To provide a method for producing an oxide sintered body suitable for forming an oxide semiconductor film of a semiconductor device with superior properties.SOLUTION: The present invention provides a method for producing an oxide sintered body containing at least indium and tungsten. In the method, used is a powder containing InWOphase as a crystal phase.SELECTED DRAWING: None

【課題】特性の高い半導体デバイスの酸化物半導体膜を形成するのに好適な酸化物焼結体の製造方法を提供する。【解決手段】酸化物焼結体の製造方法は、少なくともインジウムおよびタングステンを含む酸化物焼結体の製造方法であって、Ｉｎ6ＷＯ12相を結晶相として含む粉末を用いる。【選択図】なし

Zugriff

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

METHOD FOR PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / WATAYA KENICHI / KURISU KENICHI / SOGABE KOICHI

PROBLEM TO BE SOLVED: To provide a method for producing an oxide sintered body suitable for forming an oxide semiconductor film of a semiconductor device with superior properties.SOLUTION: The present invention provides a method for producing an oxide sintered body containing at least indium and tungsten. In the method, used is a powder containing InWOphase as a crystal phase.SELECTED DRAWING: None

【課題】特性の高い半導体デバイスの酸化物半導体膜を形成するのに好適な酸化物焼結体の製造方法を提供する。【解決手段】酸化物焼結体の製造方法は、少なくともインジウムおよびタングステンを含む酸化物焼結体の製造方法であって、Ｉｎ6ＷＯ12相を結晶相として含む粉末を用いる。【選択図】なし

METHOD FOR PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / WATAYA KENICHI / KURISU KENICHI / SOGABE KOICHI

PROBLEM TO BE SOLVED: To provide a method for producing an oxide sintered body suitable for forming an oxide semiconductor film of a semiconductor device with superior properties.SOLUTION: The present invention provides a method for producing an oxide sintered body containing at least indium and tungsten. In the method, used is a powder containing InWOphase as a crystal phase.SELECTED DRAWING: None

【課題】特性の高い半導体デバイスの酸化物半導体膜を形成するのに好適な酸化物焼結体の製造方法を提供する。【解決手段】酸化物焼結体の製造方法は、少なくともインジウムおよびタングステンを含む酸化物焼結体の製造方法であって、Ｉｎ6ＷＯ12相を結晶相として含む粉末を用いる。【選択図】なし

Zugriff

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

METHOD FOR PRODUCING OXIDE SINTERED BODY

Weitere Titelangaben:

酸化物焼結体の製造方法

Beteiligte:

MIYANAGA YOSHINORI (Autor:in) / WATAYA KENICHI (Autor:in) / KURISU KENICHI (Autor:in) / SOGABE KOICHI (Autor:in)

Erscheinungsdatum:

19.04.2018

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Japanisch

Klassifikation:

IPC: C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

Ähnliche Titel

OXIDE SINTERED BODY AND METHOD FOR PRODUCING OXIDE SINTERED BODY

AKIMOTO JUNJI / KATAOKA KUNIMITSU / KIMU YONSUKKU | Europäisches Patentamt | 2023

Freier Zugriff

OXIDE SINTERED BODY AND METHOD FOR PRODUCING OXIDE SINTERED BODY

OGAWA SHUHEI / MIYAKAWA NAOMICHI / ITO KAZUHIRO | Europäisches Patentamt | 2021

Freier Zugriff

METHOD OF PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / AWATA HIDEAKI / WATAYA KENICHI | Europäisches Patentamt | 2018

Freier Zugriff

METHOD FOR PRODUCING OXIDE SINTERED BODY

TERAMURA KYOSUKE / FUKAGAWA KOJI | Europäisches Patentamt | 2025

Freier Zugriff

ZINC OXIDE POWDER FOR PRODUCING ZINC OXIDE SINTERED BODY, ZINC OXIDE SINTERED BODY, AND METHOD OF PRODUCING THESE

NAKATA YOSHIMI / UDAGAWA ETSUROU / ECHIZENYA YUKO | Europäisches Patentamt | 2019

Freier Zugriff