METHOD FOR PRODUCING OXIDE SINTERED BODY: Fid-Bau Portal

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METHOD FOR PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / WATAYA KENICHI / KURISU KENICHI / SOGABE KOICHI

PROBLEM TO BE SOLVED: To provide a method for producing an oxide sintered body suitable for forming an oxide semiconductor film of a semiconductor device with superior properties.SOLUTION: The present invention provides a method for producing an oxide sintered body containing at least indium and tungsten. In the method, used is a powder containing InWOphase as a crystal phase.SELECTED DRAWING: None

【課題】特性の高い半導体デバイスの酸化物半導体膜を形成するのに好適な酸化物焼結体の製造方法を提供する。【解決手段】酸化物焼結体の製造方法は、少なくともインジウムおよびタングステンを含む酸化物焼結体の製造方法であって、Ｉｎ6ＷＯ12相を結晶相として含む粉末を用いる。【選択図】なし

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METHOD FOR PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / WATAYA KENICHI / KURISU KENICHI / SOGABE KOICHI

PROBLEM TO BE SOLVED: To provide a method for producing an oxide sintered body suitable for forming an oxide semiconductor film of a semiconductor device with superior properties.SOLUTION: The present invention provides a method for producing an oxide sintered body containing at least indium and tungsten. In the method, used is a powder containing InWOphase as a crystal phase.SELECTED DRAWING: None

【課題】特性の高い半導体デバイスの酸化物半導体膜を形成するのに好適な酸化物焼結体の製造方法を提供する。【解決手段】酸化物焼結体の製造方法は、少なくともインジウムおよびタングステンを含む酸化物焼結体の製造方法であって、Ｉｎ6ＷＯ12相を結晶相として含む粉末を用いる。【選択図】なし

METHOD FOR PRODUCING OXIDE SINTERED BODY

MIYANAGA YOSHINORI / WATAYA KENICHI / KURISU KENICHI / SOGABE KOICHI

PROBLEM TO BE SOLVED: To provide a method for producing an oxide sintered body suitable for forming an oxide semiconductor film of a semiconductor device with superior properties.SOLUTION: The present invention provides a method for producing an oxide sintered body containing at least indium and tungsten. In the method, used is a powder containing InWOphase as a crystal phase.SELECTED DRAWING: None

【課題】特性の高い半導体デバイスの酸化物半導体膜を形成するのに好適な酸化物焼結体の製造方法を提供する。【解決手段】酸化物焼結体の製造方法は、少なくともインジウムおよびタングステンを含む酸化物焼結体の製造方法であって、Ｉｎ6ＷＯ12相を結晶相として含む粉末を用いる。【選択図】なし

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Title:

METHOD FOR PRODUCING OXIDE SINTERED BODY

Additional title:

酸化物焼結体の製造方法

Contributors:

MIYANAGA YOSHINORI (author) / WATAYA KENICHI (author) / KURISU KENICHI (author) / SOGABE KOICHI (author)

Publication date:

2018-04-19

Type of media:

Patent

Type of material:

Electronic Resource

Language:

Japanese

Classification:

IPC: C04B Kalk , LIME / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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