Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SINTERED COMPACT AND ITS PRODUCTION METHOD
PROBLEM TO BE SOLVED: To provide a sintered compact which is excellent in thermal shock resistance and conductivity, while including corrosion resistance suitable as a component of semiconductor manufacturing devices, such as an etching apparatus; and to provide its production method.SOLUTION: A sintered compact comprises an oxyfluoride and a carbonaceous material. Preferably the carbonaceous material is carbon powder and/or carbon fiber. It is desirable that the carbonaceous material has an average particle diameter of 0.1-10 μm and is in a particle form; or the carbonaceous material has a diameter of 1-20 μm, has a length of 30-500 μm and is in a fibrous form. A sintered compact comprises 0.1-30 volume of the carbonaceous material. Preferably the sintered compact has volume resistivity of 1-10Ωcm.SELECTED DRAWING: Figure 1
【課題】エッチング装置等の半導体製造装置の構成材料として好適な耐食性を具備しつつ、耐熱衝撃性及び導電性が優れた焼結体及びその製造方法の」提供。【解決手段】焼結体は、オキシフッ化物及び炭素質材料を含む。前記炭素質材料が、カーボン粉末及び／又はカーボン繊維であることが好ましい。前記炭素質材料が平均粒径０．１〜１０μｍの粒子状であるか、或いは、前記炭素質材料が直径１〜２０以下、長さ３０〜５００μｍの繊維状であることも好ましい。前記炭素質材料を０．１〜３０体積含有する焼結体。好ましくは体積抵抗が１〜１０１０Ω・ｃｍである焼結体。【選択図】図１
SINTERED COMPACT AND ITS PRODUCTION METHOD
PROBLEM TO BE SOLVED: To provide a sintered compact which is excellent in thermal shock resistance and conductivity, while including corrosion resistance suitable as a component of semiconductor manufacturing devices, such as an etching apparatus; and to provide its production method.SOLUTION: A sintered compact comprises an oxyfluoride and a carbonaceous material. Preferably the carbonaceous material is carbon powder and/or carbon fiber. It is desirable that the carbonaceous material has an average particle diameter of 0.1-10 μm and is in a particle form; or the carbonaceous material has a diameter of 1-20 μm, has a length of 30-500 μm and is in a fibrous form. A sintered compact comprises 0.1-30 volume of the carbonaceous material. Preferably the sintered compact has volume resistivity of 1-10Ωcm.SELECTED DRAWING: Figure 1
【課題】エッチング装置等の半導体製造装置の構成材料として好適な耐食性を具備しつつ、耐熱衝撃性及び導電性が優れた焼結体及びその製造方法の」提供。【解決手段】焼結体は、オキシフッ化物及び炭素質材料を含む。前記炭素質材料が、カーボン粉末及び／又はカーボン繊維であることが好ましい。前記炭素質材料が平均粒径０．１〜１０μｍの粒子状であるか、或いは、前記炭素質材料が直径１〜２０以下、長さ３０〜５００μｍの繊維状であることも好ましい。前記炭素質材料を０．１〜３０体積含有する焼結体。好ましくは体積抵抗が１〜１０１０Ω・ｃｍである焼結体。【選択図】図１
SINTERED COMPACT AND ITS PRODUCTION METHOD
焼結体及びその製造方法
KAJINO HITOSHI (Autor:in) / IMAURA SHOJI (Autor:in)
23.08.2018
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
SINTERED COMPACT PRODUCTION METHOD, PRE-SINTERING MOLDED BODY AND SINTERED COMPACT
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