Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PIEZOELECTRIC DEVICE AND PIEZOELECTRIC DEVICE-APPLIED DEVICE
PROBLEM TO BE SOLVED: To provide: a piezoelectric device that includes a piezoelectric layer including a perovskite complex oxide having excellent crystallinity and the (100) preferred orientation; and a piezoelectric element-applied device.SOLUTION: A piezoelectric element includes: a first electrode; a second electrode; and a piezoelectric layer, which is interposed between the first electrode and the second electrode and is a layered structure of a plurality of piezoelectric films containing a crystalline perovskite complex oxide represented by general formula ABO. A first piezoelectric film, formed immediately above the first electrode among the plurality of piezoelectric films contains a perovskite complex oxide comprising potassium, sodium and niobium and having the (100) preferred orientation, where the sodium content is greater than the potassium content in A sites of the perovskite complex oxide.SELECTED DRAWING: Figure 13
【課題】（１００）面に優先配向させ、且つ結晶性に優れたペロブスカイト型複合酸化物を含む圧電体層を有する圧電素子及び圧電素子応用デバイスを提供する。【解決手段】第１電極と、第２電極と、第１電極と第２電極との間に挟持され、一般式ＡＢＯ３で表されるペロブスカイト型複合酸化物の結晶を含む複数の圧電体膜の積層体である圧電体層とを有する圧電素子であって、複数の圧電体膜のうち、第１電極の直上に形成された第１の圧電体膜は、（１００）面に優先配向し、カリウム、ナトリウム及びニオブを含んだペロブスカイト型複合酸化物を有し、ペロブスカイト型複合酸化物のＡサイトに含まれるナトリウム量がカリウム量よりも多い。【選択図】図１３
PIEZOELECTRIC DEVICE AND PIEZOELECTRIC DEVICE-APPLIED DEVICE
PROBLEM TO BE SOLVED: To provide: a piezoelectric device that includes a piezoelectric layer including a perovskite complex oxide having excellent crystallinity and the (100) preferred orientation; and a piezoelectric element-applied device.SOLUTION: A piezoelectric element includes: a first electrode; a second electrode; and a piezoelectric layer, which is interposed between the first electrode and the second electrode and is a layered structure of a plurality of piezoelectric films containing a crystalline perovskite complex oxide represented by general formula ABO. A first piezoelectric film, formed immediately above the first electrode among the plurality of piezoelectric films contains a perovskite complex oxide comprising potassium, sodium and niobium and having the (100) preferred orientation, where the sodium content is greater than the potassium content in A sites of the perovskite complex oxide.SELECTED DRAWING: Figure 13
【課題】（１００）面に優先配向させ、且つ結晶性に優れたペロブスカイト型複合酸化物を含む圧電体層を有する圧電素子及び圧電素子応用デバイスを提供する。【解決手段】第１電極と、第２電極と、第１電極と第２電極との間に挟持され、一般式ＡＢＯ３で表されるペロブスカイト型複合酸化物の結晶を含む複数の圧電体膜の積層体である圧電体層とを有する圧電素子であって、複数の圧電体膜のうち、第１電極の直上に形成された第１の圧電体膜は、（１００）面に優先配向し、カリウム、ナトリウム及びニオブを含んだペロブスカイト型複合酸化物を有し、ペロブスカイト型複合酸化物のＡサイトに含まれるナトリウム量がカリウム量よりも多い。【選択図】図１３
PIEZOELECTRIC DEVICE AND PIEZOELECTRIC DEVICE-APPLIED DEVICE
圧電素子及び圧電素子応用デバイス
KITADA KAZUYA (Autor:in)
25.10.2018
Patent
Elektronische Ressource
Japanisch
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT APPLIED DEVICE
| Europäisches Patentamt | 2017