Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ELECTROSTATIC CHUCK, SUBSTRATE FIXING DEVICE, AND PASTE
To provide an electrostatic chuck that uses a material in place of tungsten for an electrostatic electrode and has high adhesion between a base and the electrostatic electrode.SOLUTION: An electrostatic chuck includes a base, and an electrostatic electrode built into the base, and the base is made of ceramics, and the electrostatic electrode has TixOy (atomic ratio y/x of less than 1.7) as a main component, which is an oxide of titanium.SELECTED DRAWING: Figure 6
【課題】静電電極にタングステンに代わる材料を用いた、基体と静電電極との密着性が高い静電チャックの提供。【解決手段】本静電チャックは、基体と、前記基体に内蔵された静電電極と、を有し、前記基体は、セラミックスであり、前記静電電極は、チタニウムの酸化物であるＴｉｘＯｙ（原子比ｙ／ｘは１．７未満）を主成分とする。【選択図】図６
ELECTROSTATIC CHUCK, SUBSTRATE FIXING DEVICE, AND PASTE
To provide an electrostatic chuck that uses a material in place of tungsten for an electrostatic electrode and has high adhesion between a base and the electrostatic electrode.SOLUTION: An electrostatic chuck includes a base, and an electrostatic electrode built into the base, and the base is made of ceramics, and the electrostatic electrode has TixOy (atomic ratio y/x of less than 1.7) as a main component, which is an oxide of titanium.SELECTED DRAWING: Figure 6
【課題】静電電極にタングステンに代わる材料を用いた、基体と静電電極との密着性が高い静電チャックの提供。【解決手段】本静電チャックは、基体と、前記基体に内蔵された静電電極と、を有し、前記基体は、セラミックスであり、前記静電電極は、チタニウムの酸化物であるＴｉｘＯｙ（原子比ｙ／ｘは１．７未満）を主成分とする。【選択図】図６
ELECTROSTATIC CHUCK, SUBSTRATE FIXING DEVICE, AND PASTE
静電チャック、基板固定装置、ペースト
HORIUCHI MICHIO (Autor:in) / HORI RYOSUKE (Autor:in)
15.02.2024
Patent
Elektronische Ressource
Japanisch
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