Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC MIXTURE PASTE, POROUS BODY, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
A ceramic mixture paste includes oxide ceramic particles, burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles. The firing aid melts at a temperature lower than the firing temperature. The ratio of the volume of the burn-off particles to the volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
CERAMIC MIXTURE PASTE, POROUS BODY, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
A ceramic mixture paste includes oxide ceramic particles, burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles. The firing aid melts at a temperature lower than the firing temperature. The ratio of the volume of the burn-off particles to the volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
CERAMIC MIXTURE PASTE, POROUS BODY, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
MINEMURA TOMOTAKE (Autor:in)
31.01.2019
Patent
Elektronische Ressource
Englisch
Ceramic mixture paste, porous body, electrostatic chuck, and substrate fixing device
| Europäisches Patentamt | 2023
ELECTROSTATIC CHUCK, SUBSTRATE FIXING DEVICE, AND PASTE
| Europäisches Patentamt | 2024
| Europäisches Patentamt | 2019
Europäisches Patentamt | 2024
CERAMIC STRUCTURE, ELECTROSTATIC CHUCK, AND SUBSTRATE FIXING DEVICE
| Europäisches Patentamt | 2022