Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC MATERIAL LAMINATE MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND SPUTTERING TARGET MEMBER
본 발명의 세라믹스 재료는, 마그네슘, 알루미늄, 산소 및 질소를 주성분으로 하고, CuKα선을 이용했을 때의 XRD 피크가 적어도 2θ=47˚∼50˚에 나타나는 마그네슘-알루미늄 산질화물상을 주상으로 하는 것이다.
A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray.
CERAMIC MATERIAL LAMINATE MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND SPUTTERING TARGET MEMBER
본 발명의 세라믹스 재료는, 마그네슘, 알루미늄, 산소 및 질소를 주성분으로 하고, CuKα선을 이용했을 때의 XRD 피크가 적어도 2θ=47˚∼50˚에 나타나는 마그네슘-알루미늄 산질화물상을 주상으로 하는 것이다.
A heating apparatus includes a susceptor having a heating face of heating a semiconductor and a supporting part joined with a back face of the susceptor. The susceptor comprises a ceramic material comprising magnesium, aluminum, oxygen and nitrogen as main components. The material comprises a main phase comprising magnesium-aluminum oxynitride phase exhibiting an XRD peak at least in 2θ=47 to 50° by CuKα X-ray.
CERAMIC MATERIAL LAMINATE MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND SPUTTERING TARGET MEMBER
세라믹스 재료, 적층체, 반도체 제조 장치용 부재 및 스퍼터링 타겟 부재
24.04.2018
Patent
Elektronische Ressource
Koreanisch
IPC:
C04B
Kalk
,
LIME
/
B32B
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
,
Schichtkörper, d.h. aus Ebenen oder gewölbten Schichten, z.B. mit zell- oder wabenförmiger Form, aufgebaute Erzeugnisse
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
| Europäisches Patentamt | 2018
Europäisches Patentamt | 2019
Europäisches Patentamt | 2018