Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING COMPOSITE STRUCTURE
내파티클성이 우수한 세라믹 코팅의 제공 및 세라믹 코팅의 내파티클성을 평가하는 방법의 제공. 기재와, 상기 기재 상에 설치되고, 표면을 갖는 구조물을 포함하는 복합 구조물이며, 구조물이 다결정 세라믹스를 포함하여 이루어지고, 그 TEM 화상 해석으로부터 산출되는 휘도 Sa가 소정의 값을 만족시키는 복합 구조물은, 내파티클성이 요구되는 반도체 제조 장치의 내부 부재로서 적합하게 사용할 수 있다.
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING COMPOSITE STRUCTURE
내파티클성이 우수한 세라믹 코팅의 제공 및 세라믹 코팅의 내파티클성을 평가하는 방법의 제공. 기재와, 상기 기재 상에 설치되고, 표면을 갖는 구조물을 포함하는 복합 구조물이며, 구조물이 다결정 세라믹스를 포함하여 이루어지고, 그 TEM 화상 해석으로부터 산출되는 휘도 Sa가 소정의 값을 만족시키는 복합 구조물은, 내파티클성이 요구되는 반도체 제조 장치의 내부 부재로서 적합하게 사용할 수 있다.
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
COMPOSITE STRUCTURE AND DISPLAY MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING DEVICE HAVING COMPOSITE STRUCTURE
복합 구조물 및 복합 구조물을 구비한 반도체 제조 장치 그리고 디스플레이 제조 장치
23.04.2020
Patent
Elektronische Ressource
Koreanisch
IPC:
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
| Europäisches Patentamt | 2020
| Europäisches Patentamt | 2019
| Europäisches Patentamt | 2020
| Europäisches Patentamt | 2019
| Europäisches Patentamt | 2020