Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
IWASAWA JUNICHI (Autor:in) / ASHIZAWA HIROAKI (Autor:in) / WADA TAKUMA (Autor:in) / TAKIZAWA RYOTO (Autor:in) / AOSHIMA TOSHIHIRO (Autor:in) / TAKAHASHI YUUKI (Autor:in) / KINJO ATSUSHI (Autor:in)
12.09.2019
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
/
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C01G
Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle
,
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
| Europäisches Patentamt | 2020
| Europäisches Patentamt | 2020
Europäisches Patentamt | 2020
| Europäisches Patentamt | 2019
| Europäisches Patentamt | 2020