Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
프로세싱 챔버를 위한 챔버 컴포넌트는 Y2O3-ZrO2의 하나 이상의 상으로 본질적으로 구성된 소결된 세라믹 재료로 구성된 세라믹 바디를 포함한다. 세라믹 재료는 55-65 mol% Y2O3 및 35-45 mol% ZrO2로 본질적으로 구성된다.
A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y2O3—ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y2O3—ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
프로세싱 챔버를 위한 챔버 컴포넌트는 Y2O3-ZrO2의 하나 이상의 상으로 본질적으로 구성된 소결된 세라믹 재료로 구성된 세라믹 바디를 포함한다. 세라믹 재료는 55-65 mol% Y2O3 및 35-45 mol% ZrO2로 본질적으로 구성된다.
A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y2O3—ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y2O3—ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
플라즈마 환경들 내의 챔버 컴포넌트들을 위한 Y2O3-ZrO2 부식 저항성 재료
18.07.2022
Patent
Elektronische Ressource
Koreanisch
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
Europäisches Patentamt | 2024
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
| Europäisches Patentamt | 2019
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
| Europäisches Patentamt | 2022
Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
| Europäisches Patentamt | 2019
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
| Europäisches Patentamt | 2021