Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y2O3—ZrO2. The ceramic material consists essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
A chamber component for a processing chamber comprises a ceramic body consisting of a sintered ceramic material consisting essentially of one or more phase of Y2O3—ZrO2. The ceramic material consists essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
SUN JENNIFER Y (Autor:in) / FENWICK DAVID (Autor:in)
25.05.2021
Patent
Elektronische Ressource
Englisch
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
Europäisches Patentamt | 2024
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
| Europäisches Patentamt | 2022
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
Europäisches Patentamt | 2022
Y2O3-ZrO2 Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
| Europäisches Patentamt | 2019
Y2O3-ZrO2 EROSION RESISTANT MATERIAL FOR CHAMBER COMPONENTS IN PLASMA ENVIRONMENTS
| Europäisches Patentamt | 2019