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Cordierite-based sintered body, method for producing the same, and composite substrate
A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
Cordierite-based sintered body, method for producing the same, and composite substrate
A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
Cordierite-based sintered body, method for producing the same, and composite substrate
ISODA YOSHINORI (Autor:in) / SUZUKI YOSHIO (Autor:in) / INOUE KATSUHIRO (Autor:in) / KATSUDA YUJI (Autor:in)
14.12.2021
Patent
Elektronische Ressource
Englisch
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