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CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE
A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm; ° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE
A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm; ° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE
ISODA YOSHINORI (Autor:in) / SUZUKI YOSHIO (Autor:in) / INOUE KATSUHIRO (Autor:in) / KATSUDA YUJI (Autor:in)
28.09.2017
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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