Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y2O3—ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y2O3—ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
A method of manufacturing a chamber component for a processing chamber comprises forming a green body using a Y2O3—ZrO2 powder consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2; and sintering the green body to produce a sintered ceramic body consisting essentially of one or more phase of Y2O3—ZrO2, the sintered ceramic body consisting essentially of 55-65 mol % Y2O3 and 35-45 mol % ZrO2.
Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments
SUN JENNIFER Y (Autor:in) / FENWICK DAVID (Autor:in)
06.06.2023
Patent
Elektronische Ressource
Englisch
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