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Yttrium oxide-based sintered body and semiconductor production system member
An yttrium oxide-based sintered body contains yttrium oxide as a main constituent and 0.1 wt % or more and 5.0 wt % or less of zirconium on a ZrO2 basis. Such an yttrium oxide-based sintered body made with yttrium oxide and a certain amount of zirconium oxide therein is highly resistant to corrosive chemicals while maintaining superior resistance to plasma and corrosive gases.
Yttrium oxide-based sintered body and semiconductor production system member
An yttrium oxide-based sintered body contains yttrium oxide as a main constituent and 0.1 wt % or more and 5.0 wt % or less of zirconium on a ZrO2 basis. Such an yttrium oxide-based sintered body made with yttrium oxide and a certain amount of zirconium oxide therein is highly resistant to corrosive chemicals while maintaining superior resistance to plasma and corrosive gases.
Yttrium oxide-based sintered body and semiconductor production system member
TAKAHASHI YUKI (Autor:in)
29.10.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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