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MULLITE-CONTAINING SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND COMPOSITE SUBSTRATE
A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
MULLITE-CONTAINING SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND COMPOSITE SUBSTRATE
A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
MULLITE-CONTAINING SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND COMPOSITE SUBSTRATE
ISODA YOSHINORI (Autor:in) / SUZUKI YOSHIO (Autor:in) / INOUE KATSUHIRO (Autor:in) / KATSUDA YUJI (Autor:in)
28.09.2017
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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