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MULLITE-CONTAINING SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND COMPOSITE SUBSTRATE
A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
MULLITE-CONTAINING SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND COMPOSITE SUBSTRATE
A mullite-containing sintered body according to the present invention contains mullite and at least one selected from the group consisting of silicon nitride, silicon oxynitride, and sialon. It is preferable that the mullite-containing sintered body have a thermal expansion coefficient of less than 4.3 ppm/° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1.5 μm or less.
MULLITE-CONTAINING SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND COMPOSITE SUBSTRATE
ISODA YOSHINORI (author) / SUZUKI YOSHIO (author) / INOUE KATSUHIRO (author) / KATSUDA YUJI (author)
2017-09-28
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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