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Multi-Layer Photo Definable Glass with Integrated Devices
The invention relates to eliminating or dramatically reducing the mechanical distortion induced in photo-definable glass as a function of temperature and time processing during metallization that enable multi-layer and single layer photo-definable structures, that can contain electronic, photonic, or MEMS devices to create unique vertically integrated device or system level structures.
Multi-Layer Photo Definable Glass with Integrated Devices
The invention relates to eliminating or dramatically reducing the mechanical distortion induced in photo-definable glass as a function of temperature and time processing during metallization that enable multi-layer and single layer photo-definable structures, that can contain electronic, photonic, or MEMS devices to create unique vertically integrated device or system level structures.
Multi-Layer Photo Definable Glass with Integrated Devices
FLEMMING JEB H (Autor:in) / BULLINGTON JEFF A (Autor:in)
13.06.2019
Patent
Elektronische Ressource
Englisch
British Library Online Contents | 2009
|MULTI-LAYER GLASS AND MANUFACTURING METHOD FOR MULTI-LAYER GLASS
Europäisches Patentamt | 2025
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