A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Multi-Layer Photo Definable Glass with Integrated Devices
The invention relates to eliminating or dramatically reducing the mechanical distortion induced in photo-definable glass as a function of temperature and time processing during metallization that enable multi-layer and single layer photo-definable structures, that can contain electronic, photonic, or MEMS devices to create unique vertically integrated device or system level structures.
Multi-Layer Photo Definable Glass with Integrated Devices
The invention relates to eliminating or dramatically reducing the mechanical distortion induced in photo-definable glass as a function of temperature and time processing during metallization that enable multi-layer and single layer photo-definable structures, that can contain electronic, photonic, or MEMS devices to create unique vertically integrated device or system level structures.
Multi-Layer Photo Definable Glass with Integrated Devices
FLEMMING JEB H (author) / BULLINGTON JEFF A (author)
2019-06-13
Patent
Electronic Resource
English
| British Library Online Contents | 2009
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