Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
HIDAKA NOBUHIRO (Autor:in) / KUGIMOTO HIRONORI (Autor:in)
19.12.2019
Patent
Elektronische Ressource
Englisch
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