Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
HIDAKA NOBUHIRO (Autor:in) / KUGIMOTO HIRONORI (Autor:in)
12.12.2023
Patent
Elektronische Ressource
Englisch
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