Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD AND SOCKET FOR PACKAGE INSPECTION
A ceramic containing, in mass %:Si3N4: 20.0 to 60.0%,ZrO2: 25.0 to 70.0%,at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less,at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency.Fn=(SiC+3AlN)/(Si3N4+ZrO2) (1)
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD AND SOCKET FOR PACKAGE INSPECTION
A ceramic containing, in mass %:Si3N4: 20.0 to 60.0%,ZrO2: 25.0 to 70.0%,at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less,at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency.Fn=(SiC+3AlN)/(Si3N4+ZrO2) (1)
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD AND SOCKET FOR PACKAGE INSPECTION
YAMAGISHI WATARU (Autor:in) / MORI KAZUMASA (Autor:in) / ETO SHUNICHI (Autor:in)
05.10.2023
Patent
Elektronische Ressource
Englisch
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
| Europäisches Patentamt | 2021
Ceramic, probe guiding member, probe card, and socket for package inspection
| Europäisches Patentamt | 2024
Ceramic, probe guiding member, probe card, and socket for package inspection
| Europäisches Patentamt | 2022
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
| Europäisches Patentamt | 2020
Ceramic, probe guide member, probe card, and socket for package inspection
| Europäisches Patentamt | 2023