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CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION

YAMAGISHI WATARU / MORI KAZUMASA / ETO SHUNICHI

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.

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CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION

YAMAGISHI WATARU / MORI KAZUMASA / ETO SHUNICHI

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.

CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION

YAMAGISHI WATARU / MORI KAZUMASA / ETO SHUNICHI

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.

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Titel:

CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION

Beteiligte:

YAMAGISHI WATARU (Autor:in) / MORI KAZUMASA (Autor:in) / ETO SHUNICHI (Autor:in)

Erscheinungsdatum:

30.07.2020

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Englisch

Klassifikation:

IPC: G01R Messen elektrischer Größen , MEASURING ELECTRIC VARIABLES / C04B Kalk , LIME

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