Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
FILM-COATED MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING FILM-COATED MEMBER
A film-coated member includes a substrate, and a film of an oxide, a fluoride, an oxyfluoride, or a nitride of a rare earth element on at least a part of the substrate. The film has a reflectance greater than 50% at a wavelength of 700 nm and less than 50% at a wavelength of 400 nm.
FILM-COATED MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING FILM-COATED MEMBER
A film-coated member includes a substrate, and a film of an oxide, a fluoride, an oxyfluoride, or a nitride of a rare earth element on at least a part of the substrate. The film has a reflectance greater than 50% at a wavelength of 700 nm and less than 50% at a wavelength of 400 nm.
FILM-COATED MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING FILM-COATED MEMBER
ISHIKAWA KAZUHIRO (Autor:in)
17.10.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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