A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
FILM-COATED MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING FILM-COATED MEMBER
A film-coated member includes a substrate, and a film of an oxide, a fluoride, an oxyfluoride, or a nitride of a rare earth element on at least a part of the substrate. The film has a reflectance greater than 50% at a wavelength of 700 nm and less than 50% at a wavelength of 400 nm.
FILM-COATED MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING FILM-COATED MEMBER
A film-coated member includes a substrate, and a film of an oxide, a fluoride, an oxyfluoride, or a nitride of a rare earth element on at least a part of the substrate. The film has a reflectance greater than 50% at a wavelength of 700 nm and less than 50% at a wavelength of 400 nm.
FILM-COATED MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING FILM-COATED MEMBER
ISHIKAWA KAZUHIRO (author)
2024-10-17
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
MANUFACTURING METHOD OF SPRAY COATING FILM COATED MEMBER AND SPRAY COATING FILM COATED MEMBER
| European Patent Office | 2021