Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC SUBSTATE WITH REACTION-BONDED SILICON CARBIDE HAVING DIAMOND PARTICLES
A composite material can include: a substrate of a first reaction-bonded silicon carbide (first RB—SiC) material; and a reaction-bonded diamond-retaining silicon carbide (RB-DSiC) layer bonded to a surface of the substrate. In some aspects, the RB-DSiC layer includes diamond particles bonded with a second reaction-bonded silicon carbide (second RB—SiC) material. The diamond particles may be homogeneously distributed through the second RB—SiC or only at the surface thereof. The diamond particles can be in an ordered pattern or un-ordered pattern. For example, a CMP conditioning disc can include the composite material of one of the embodiments.
CERAMIC SUBSTATE WITH REACTION-BONDED SILICON CARBIDE HAVING DIAMOND PARTICLES
A composite material can include: a substrate of a first reaction-bonded silicon carbide (first RB—SiC) material; and a reaction-bonded diamond-retaining silicon carbide (RB-DSiC) layer bonded to a surface of the substrate. In some aspects, the RB-DSiC layer includes diamond particles bonded with a second reaction-bonded silicon carbide (second RB—SiC) material. The diamond particles may be homogeneously distributed through the second RB—SiC or only at the surface thereof. The diamond particles can be in an ordered pattern or un-ordered pattern. For example, a CMP conditioning disc can include the composite material of one of the embodiments.
CERAMIC SUBSTATE WITH REACTION-BONDED SILICON CARBIDE HAVING DIAMOND PARTICLES
SALAMONE SAMUEL M (Autor:in) / EVANS JR GLENN (Autor:in)
31.10.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
/
B24B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
,
Maschinen, Einrichtungen oder Verfahren zum Schleifen oder Polieren
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
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