Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Aluminum Nitride Assemblage
This invention relates to an assemblage of a semiconductor processing apparatus comprising a first aluminum nitride (AlN) component and a second aluminum nitride component, wherein the first and second aluminum nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising Y2O3—Al2O3—SiO2 (YAS) glass; and at least one of crystalline aluminosilicate and aluminum nitride.
Aluminum Nitride Assemblage
This invention relates to an assemblage of a semiconductor processing apparatus comprising a first aluminum nitride (AlN) component and a second aluminum nitride component, wherein the first and second aluminum nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising Y2O3—Al2O3—SiO2 (YAS) glass; and at least one of crystalline aluminosilicate and aluminum nitride.
Aluminum Nitride Assemblage
LEE CHENGTSIN (Autor:in) / CARLONI DAVID (Autor:in)
12.12.2024
Patent
Elektronische Ressource
Englisch
TIBKAT | 1.1986 - 41.2000; damit Ersch. eingest.
ALUMINUM NITRIDE POWDER AND ALUMINUM NITRIDE SINTERED COMPACT
| Europäisches Patentamt | 2017