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    Aluminum Nitride Assemblage

    New search for: LEE CHENGTSIN
    New search for: CARLONI DAVID

    This invention relates to an assemblage of a semiconductor processing apparatus comprising a first aluminum nitride (AlN) component and a second aluminum nitride component, wherein the first and second aluminum nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising Y2O3—Al2O3—SiO2 (YAS) glass; and at least one of crystalline aluminosilicate and aluminum nitride.

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    Aluminum Nitride Assemblage

    New search for: LEE CHENGTSIN
    New search for: CARLONI DAVID

    This invention relates to an assemblage of a semiconductor processing apparatus comprising a first aluminum nitride (AlN) component and a second aluminum nitride component, wherein the first and second aluminum nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising Y2O3—Al2O3—SiO2 (YAS) glass; and at least one of crystalline aluminosilicate and aluminum nitride.

    Access

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    Aluminum Nitride Assemblage

    New search for: LEE CHENGTSIN
    New search for: CARLONI DAVID

    This invention relates to an assemblage of a semiconductor processing apparatus comprising a first aluminum nitride (AlN) component and a second aluminum nitride component, wherein the first and second aluminum nitride components are connected by a joint, said joint comprising a composite glass-ceramic comprising Y2O3—Al2O3—SiO2 (YAS) glass; and at least one of crystalline aluminosilicate and aluminum nitride.

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    Title:

    Aluminum Nitride Assemblage

    Contributors:

    LEE CHENGTSIN (author) / CARLONI DAVID (author)

    Publication date:

    2024-12-12

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C03C Chemische Zusammensetzungen für Gläser, Glasuren oder Emails , CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS / C04B Kalk , LIME

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