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Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate
Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom %.
Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate
Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom %.
Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate
TONOMURA HIROSHI (Autor:in) / KITAHARA TAKESHI (Autor:in) / ISHIZUKA HIROYA (Autor:in) / KUROMITSU YOSHIROU (Autor:in) / NAGATOMO YOSHIYUKI (Autor:in)
14.07.2015
Patent
Elektronische Ressource
Englisch
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